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受约束运动机构的控制性能及设计要求估计论文
Classified Index: TP273+.5
U.D.C: 621
Dissertation for the Master Degree of Engineering
ESTIMATION OF CONTROL PERFORMANCE AND
DESIGN REQUIREMENTS OF MOTION
MECHANISMS WITHIN CONSTRAINTS
Candidate: Huimin Shao
Supervisor: Prof. Zexiang Li
Co- Supervisor: Dr. D. Liao, Dr. Jacob W.F. Cheung
Academic Degree Applied for: Master of Engineering
Specialty: Electrical Engineering
Affiliation: Shenzhen Graduate School
Date of Defence: December, 2008
Degree-Conferring-Institution: Harbin Institute of Technology
ABSTRACT
High precision and high speed motion servo system is widely used in
semiconductor manufacturing. In this thesis, the performance limitation of the servo
systems will be estimated. This proposed method doesn’t only focus on the theoretical
calculation, but also combines with the actual system and has the practical meaning.
Firstly, system identification of machine servo system is discussed. It has a high
speed and high precision X-Y table, which includes high frequency anti-vibration units
for micro vibration control. Hence based on the theoretical model, the low-frequency
nominal model, the high-frequency vibration model and the chassis model of the
mechanism are identified in order to design the high precision controller. Low-
frequency model based on the physical pattern is identified by time-domain method.
High-frequency and chassis model based on the vibration pattern is identified by
frequency-domain method.
Secondly, with the physical limitations obtained from the identified model, an
optimal four-order profile
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