基于输入整形技术的固晶机柔性臂减振研究-控制科学与工程专业论文.docxVIP

Classified Index: TH113.2 U.D.C: 621 Dissertation for the Master Degree of Engineering REDUCING VIBRATION OF A FLEXIBLE ARM IN DIE BONDER BASED ON INPUT SHAPING Candidate:Hua Huang Candidate: Hua Huang Supervisor: Prof. Yu Wa Academic Degree Applied for: Master of En Specialty: Control Scie Affiliation: Shenzhen Gr Date of Defence: December, 2 Degree-Conferring-Institution: Harbin Instit nce and Engineering aduate School 009 ute of Technology I I 摘 要 输入整形技术能有效抑制低阻尼柔性系统的残余振荡。因其应用简便，对建立 模型不确定性的鲁棒性好，从而在高速高精度的运动控制定位系统中得到了广泛的 应用。 论文首先介绍了输入整形的基本概念，并阐述了其设计的方法和步骤，进一步 说明了其能够抑制系统残余振荡的原因。然后通过仿真对比和实验验证的方法，对 输入整形器的鲁棒性进行分析，并得到了对实际工程应用具有一定参考价值的仿真 结果。由于固晶机柔性拾取臂在高速运动时的残余振荡会影响产品工艺质量，本文 针对这一问题，采用输入整形技术对其进行控制。 在实际应用中，由于固晶机对控制周期时间和定位精度的要求，考虑到输入整 形器的时滞性，首先利用 PID 控制来提高系统的定位精度，并提出基于输入整形 器的离线微分规划的方法来补偿该算法的时滞，同时抑制系统的残余振荡，从而达 到了高速高精度的控制要求。 关键词：输入整形；残余振荡；固晶机；高速高精度； II II ABSTRACT Input shaping is a method of reducing residual vibrations of low damped flexible system. Due to its simplicity, effectiveness, and robust to modeling uncertain, this technique has been widely used in high-speed and high-precision motion controlled positioning machines. This dissertation firstly introduces the basic theory of input shaping, and explains the methods and steps to design input shaper particularly, from which gives the inherent essence to suppress the residual vibration of flexible system. By simulation and comparison, the research of the robustness of the input shaper is given then. How the error of the natural frequency and damping will perform the response of the system will be discussed herein. The results supply greatly references for the application lately. Finally, input shaping was used in the control of the flexible operation-arm, which has the residual vibration problem when moving in high speed in die bonder system. Considering the time delay property of input shaper, and the shorter control time circle and accuracy in die bonder, a new method based on offline derivative profile was used here.