- 1、本文档共30页,可阅读全部内容。
- 2、原创力文档(book118)网站文档一经付费(服务费),不意味着购买了该文档的版权,仅供个人/单位学习、研究之用,不得用于商业用途,未经授权,严禁复制、发行、汇编、翻译或者网络传播等,侵权必究。
- 3、本站所有内容均由合作方或网友上传,本站不对文档的完整性、权威性及其观点立场正确性做任何保证或承诺!文档内容仅供研究参考,付费前请自行鉴别。如您付费,意味着您自己接受本站规则且自行承担风险,本站不退款、不进行额外附加服务;查看《如何避免下载的几个坑》。如果您已付费下载过本站文档,您可以点击 这里二次下载。
- 4、如文档侵犯商业秘密、侵犯著作权、侵犯人身权等,请点击“版权申诉”(推荐),也可以打举报电话:400-050-0827(电话支持时间:9:00-18:30)。
查看更多
Waferlevel microoptics with mechanical (Waferlevel microoptics与机械)
y
n
a
p
m
o
c 9th Annual MEMS Symposium, San Jose, CA
y
r
e Thursday, May 19, 2011
v
i
l
e
d
n
o
t
o
h
p
e Wafer-level micro-optics with
h
T
mechanical features
Dr. Jyrki Saarinen
Co-Founder and Senior Vice President
Copyright © 2011 Heptagon JSa / 070207 v2.2 p.1
y
n
a
p
m
o Outline
c
y
r
e
v
i
l
e
d
n (1) Introduction to micro-optics
o
t
o (2) Introduction to wafer-level micro-optics
h
p
e (3) Company overview
h
T
(4) Wafer-level manufacturing
(5) Applications
(6) Summary
Copyright © 2011 Heptagon JSa / 070207 v2.2 p.2
y
n
a
p
m
o Outline
c
y
r
e
v
i
l
e
d
n (1) Introduction to micro-optics
o
t
o (2) Introduction to wafer-level micro-optics
h
p
e (3) Company overview
h
T
(4) Wafer-level manufacturing
(5) Applications
(6) Summary
Copyright © 2011 Heptagon JSa / 070207 v2.2 p.3
Micro-optics
y
n
a
p
m Micro-optics means
o
c
y flat optical elements (refractive and diffractive) with features in the
r
e
v sub-mm or sub-um range, which are fabricated mainly by state-of-the-
i
l
e art lithographic methods
d
n
o
t
o
h
p Refractive micro-optics
e
h Analog to conventional optics, but smaller
T
and lighter
您可能关注的文档
- VOLVO ishift Bruckners Truck Sales(沃尔沃ishift布鲁克纳卡车销售).pdf
- VOLVO ishift Overdrive, for Volvo D11, D13 (沃尔沃ishift超速档,为沃尔沃这里,D13).pdf
- volvo power Volvo Trucks(沃尔沃动力沃尔沃卡车).pdf
- volvo penta interceptor system 3001050(沃尔沃遍达拦截系统3001050).pdf
- VOLVO PENTA IPS 800 INBOARD (沃尔沃遍达800 IPS内侧).pdf
- VOLVO VOLVO Just seal it! VICTOR REINZ(沃尔沃,沃尔沃就密封!).pdf
- volvo vida dice User Manual obd2be(沃尔沃维达obd2be骰子的用户手册).pdf
- VOLVO TRUCK ACCESSORIES VOLVO FMX(沃尔沃卡车配件那么玩FMX沃尔沃).pdf
- vOLvO XC90 Quick Guide ESD(沃尔沃XC90 ESD快速指南).pdf
- Vortex Tubes, easy to install, compact, quick (涡管、易于安装、紧凑、快速).pdf
文档评论(0)