侧向流场作用下微电沉积数值仿真分析说明书.docx

PAGE PAGE 2 侧向流场作用下微电沉积数值仿真分析 摘 要：在科技发展日新月异的今天，制造业的生产技术也在更新换代。随着3D技术的发展，微观制造领域的生产技术取得突破性的进展。微电沉积技术就是利用了3D打印技术的理念，在原本的基础上改进创新。 基于电化学原理，微区电沉积是一种在电解液环境下沉积金属的过程。电解加工方法与传统机械加工相比，其优势在于加工工件与被加工零件不接触。微电沉积技术加工优点在于加工过程中不需要对被加工材料进行切削，因此加工工件也不会出现磨损的损耗问题，这样不仅可以提高加工工件重复利用率，更使得生产效率和加工质量得以提升。但是在技术发展的同时也得带来了许多附加的问题，如沉积速率慢，沉积区域定性不佳，沉积的质量存在问题等不足之处。因此，需要对微电沉积技术在加工过程中涉及到的各项参数进行研究。 本文通过对电极尺寸、电极电位、电解液浓度以及电解液流速等参数进行有限元仿真模拟实验，通过建立与实际加工过程相似的仿真模型，运用COMSOL仿真软件，对电场与流场耦合的条件下，通过改变电沉积过程中某一项参数，观察实验结果如沉积高度以及沉积速率，从而探索各个参数对加工过程的影响程度，进一步提高加工质量和沉积速率。 关键词：电沉积；耦合仿真；COMSOL  Numerical simulation analysis of microelectric deposition under lateral flow field. Abstract：Today, with the rapid development of science and technology, the manufacturing technology is also changing.With the development of 3D technology, breakthroughs have been made in micro manufacturing. Micro-electrodeposition technology is to use the concept of 3D printing technology to improve innovation on the original basis. Based on electrochemical principle, microzonal electrodeposition is a process of depositing metal in electrolyte environment. Compared with traditional machining, the advantage of electrolytic machining is that the workpiece is not in contact with the processed part. Micro electroplating technology in the process of machining is no need to be processed material cutting, also won't appear so machining problem of wear loss and repeat utilization, which can not only improve machining makes the production efficiency and processing quality was improved. However, many additional problems have to be brought along with the development of technology, such as slow deposition rate, poor characterization of sedimentary areas, and problems in sedimentary quality. Therefore, it is necessary to study the parameters involved in the process of micro-electrodeposition technology. This article through to the size of electrode, electrode potential, electrolyte concentration and electrolyte flow parameters such as the finite element sim